Microsystem Design

Author: Stephen D. Senturia
Publisher: Springer Science & Business Media
ISBN: 0306476010
Format: PDF, ePub
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It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Micro Electro Mechanical System Design

Author: James J. Allen
Publisher: CRC Press
ISBN: 1420027751
Format: PDF, ePub, Mobi
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It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development: Understanding the fabrication technologies that are available Recognizing the relevant physics involved for micron scale devices Considering implementation issues applicable to computer aided design Focusing on the engineering details and the subsequent evaluation testing Maintaining an eye for detail regarding both reliability and packaging These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.

Introduction to Microelectromechanical Systems Engineering

Author: Nadim Maluf
Publisher: Artech House
ISBN: 9781580535915
Format: PDF
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Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Nonlinear Physics with Mathematica for Scientists and Engineers

Author: Richard H. Enns
Publisher: Springer Science & Business Media
ISBN: 1461202116
Format: PDF, ePub, Docs
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Nonlinear physics continues to be an area of dynamic modern research, with applications to physics, engineering, chemistry, mathematics, computer science, biology, medicine and economics. In this text extensive use is made of the Mathematica computer algebra system. No prior knowledge of Mathematica or programming is assumed. This book includes 33 experimental activities that are designed to deepen and broaden the reader's understanding of nonlinear physics. These activities are correlated with Part I, the theoretical framework of the text.

Modeling MEMS and NEMS

Author: John A. Pelesko
Publisher: CRC Press
ISBN: 1420035290
Format: PDF, Kindle
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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization of micro- and nanoscale devices. After some introductory material, a review of continuum mechanics, and a study of scaling, the book is organized around phenomena. Each chapter addresses a sequence of real devices that share a common feature. The authors abstract that feature from the devices and present the mathematical tools needed to model it. They construct, analyze, and interpret a series of models of increasing complexity, then at the end of the chapter, they return to one of the devices described, apply the model to it, and interpret the analysis. In the beginning, the world of microdevices was dominated by experimental work and the development of fabrication techniques. As it matures, optimization and innovative designs are moving to the forefront. Modeling MEMS and NEMS not only provides the practical background and tools needed to design and optimize microdevices but it also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

Micromachined Transducers Sourcebook

Author: Gregory T. A. Kovacs
Publisher: McGraw-Hill Science, Engineering & Mathematics
ISBN: 9780072907223
Format: PDF
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Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with micromachining approaches and including all major categories of transduction. It examines the fabrication of individual devices through the study of design issues and provides examples of key transducers, or structures, for comparison of performances obtainable through different approaches.

Introduction to Microfabrication

Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 1119991897
Format: PDF, Mobi
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This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e

Introduction to Nanoscience

Author: Gabor L. Hornyak
Publisher: CRC Press
ISBN: 1420048066
Format: PDF, ePub, Docs
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Tomorrow’s nanoscientist will have a truly interdisciplinary and nano-centric education, rather than, for example, a degree in chemistry with a specialization in nanoscience. For this to happen, the field needs a truly focused and dedicated textbook. This full-color masterwork is such a textbook. It introduces the nanoscale along with the societal impacts of nanoscience, then presents an overview of characterization and fabrication methods. The authors systematically discuss the chemistry, physics, and biology aspects of nanoscience, providing a complete picture of the challenges, opportunities, and inspirations posed by each facet before giving a brief glimpse at nanoscience in action: nanotechnology. This book is written to provide a companion volume to Fundamentals of Nanotechnology. The two companion volumes are also available bound together in the single volume, Introduction to Nanoscience and Nanotechnology Qualifying instructors who purchase either of these volumes (or the combined set) are given online access to a wealth of instructional materials. These include detailed lecture notes, review summaries, slides, exercises, and more. The authors provide enough material for both one- and two-semester courses.

Microbiorobotics

Author: Minjun Kim
Publisher: William Andrew
ISBN: 0323430198
Format: PDF, Docs
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Microbiorobotics: Biologically Inspired Microscale Robotic Systems, Second Edition presents information on a new engineering discipline that takes a multidisciplinary approach to accomplish precise manipulation of microscale spaces. Microorganisms have evolved various mechanisms to thrive in microscale environments and are therefore a useful tool for use in many applications, ranging from micromanufacturing techniques, to cellular manipulation. In the context of microrobotics, biological microrobots can directly harness the microorganisms for propulsive and sensing power and synthetic microrobots can mimic the microorganisms’ motions for effective locomotion. This second edition covers new advances and insights that have emerged in recent years. Several new chapters have been added on important new research areas, with existing chapters thoroughly revised. In particular, increased coverage is given to fluid dynamics of microswimmers in nature. Gives the reader an understanding of the fundamental changes in dynamics and fabrication techniques in the microenvironment Offers a unique two-pronged approach to microrobotics from a biological perspective, i.e. bioinspired engineering design of biological systems to accomplish engineering tasks Introduces an interdisciplinary readership to the toolkit that micro-organisms offer to micro-engineering