Micro Mechanical Systems

Author: T. Fukuda
Publisher: Elsevier
ISBN: 0080536549
Format: PDF
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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Micro Mechanical Transducers

Author: Min-hang Bao
Publisher: Elsevier
ISBN: 9780080524030
Format: PDF, Docs
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Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

Analysis and Design Principles of MEMS Devices

Author: Minhang Bao
Publisher: Elsevier
ISBN: 9780080455624
Format: PDF, ePub, Mobi
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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

The MEMS Handbook

Author: Mohamed Gad-el-Hak
Publisher: CRC Press
ISBN: 9781420050905
Format: PDF, ePub, Docs
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The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Analysis and Design Principles of MEMS Devices

Author: Minhang Bao
Publisher: Elsevier
ISBN: 9780080455624
Format: PDF
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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

The Industrial Electronics Handbook

Author: J. David Irwin
Publisher: CRC Press
ISBN: 9780849383434
Format: PDF, ePub
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From traditional topics that form the core of industrial electronics, to new and emerging concepts and technologies, The Industrial Electronics Handbook, in a single volume, has the field covered. Nowhere else will you find so much information on so many major topics in the field. For facts you need every day, and for discussions on topics you have only dreamed of, The Industrial Electronics Handbook is an ideal reference.

MEMS Mechanical Sensors

Author: Stephen Beeby
Publisher: Artech House
ISBN: 9781580538732
Format: PDF, ePub, Mobi
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Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

MOEMS

Author: M. Edward Motamedi
Publisher: SPIE Press
ISBN: 9780819450210
Format: PDF, Mobi
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This is a great compendium of fundamentals, research, and applications in the rapidly growing area of optical microsystems. Every engineer working on MOEMS should have this on his or her bookshelf. --Douglas R. Sparks, Ph.D., Executive Vice President, Integrated Sensing Systems Inc. (ISSYS) This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Encyclopedic Handbook of Integrated Optics

Author: Kenichi Iga
Publisher: CRC Press
ISBN: 1351836838
Format: PDF, ePub, Mobi
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As optical technologies move closer to the core of modern computer architecture, there arise many challenges in building optical capabilities from the network to the motherboard. Rapid advances in integrated optics technologies are making this a reality. However, no comprehensive, up-to-date reference is available to the technologies and principles underlying the field. The Encyclopedic Handbook of Integrated Optics fills this void, collecting the work of 53 leading experts into a compilation of the most important concepts, phenomena, technologies, and terms covering all related fields. This unique book consists of two types of entries: the first is a detailed, full-length description; the other, a concise overview of the topic. Additionally, the coverage can be divided into four broad areas: A survey of the basics of integrated optics, exploring theory, practical concerns, and the fundamentals behind optical devices Focused discussion on devices and components such as arrayed waveguide grating, various types of lasers, optical amplifiers, and optoelectronic devices In-depth examination of subsystems including MEMS, optical pickup, and planar lightwave circuits Finally, systems considerations such as multiplexing, demultiplexing, 3R circuits, transmission, and reception Offering a broad and complete treatment of the field, the Encyclopedic Handbook of Integrated Optics is the complete guide to the fundamentals, principles, and applications of integrated optics technology.

Opto Mechatronic Systems Handbook

Author: Hyungsuck Cho
Publisher: CRC Press
ISBN: 1420040693
Format: PDF, ePub, Docs
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Opto-mechatronics-the fusion of optical and mechatronic technologies-has been integral in the evolution of machines, systems, and products that are smaller and more precise, more intelligent, and more autonomous. For the technology to reach its full potential, however, engineers and researchers from many disciplines must learn to work together through every phase of system development. To date, little effort has been expended, either in practice or in the literature, to eliminate the boundaries that exist between the optics and mechatronics communities. The Opto-Mechatronics Systems Handbook is the first step in that direction. Richly illustrated and featuring contributions from an international panel of experts, it meets three essential objectives: Ö Present the definitions, fundamentals, and applications of the technology Ö Provide a multidisciplinary perspective that shows how optical systems and devices can be integrated with mechatronic systems at all stages, from conceptualization to design and manufacturing Ö Demonstrate the roles and synergistic effects of optical systems in overall system performance Along with his fresh approach and systems perspective, the editor has taken care to address real cutting-edge technologies, including precision opto-mechatronic systems, intelligent robots, and opto-microsensors. Ultimately, the Opto-Mechatronics Systems Handbook provides readers with the technological foundation for developing further innovative products and systems.