New Approaches to Image Processing based Failure Analysis of Nano Scale ULSI Devices

Author: Zeev Zalevsky
Publisher: William Andrew
ISBN: 0128000171
Format: PDF, ePub, Mobi
Download Now
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can’t keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. This book presents novel "smart" image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips. The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips. Acquaints users with new software-based approaches to enhance high-resolution microscope imaging of microchip structures Demonstrates how these methods lead to productivity gains in the development of ULSI chips Presents several techniques for the superresolution of images, enabling engineers and scientists to improve their results in failure analysis of microelectronic chips

Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli
Publisher: William Andrew
ISBN: 0323312233
Format: PDF, ePub, Docs
Download Now
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Additive Fertigung von Bauteilen und Strukturen

Author: Hans Albert Richard
Publisher: Springer-Verlag
ISBN: 3658177802
Format: PDF, Mobi
Download Now
Dieses Fachbuch vermittelt in insgesamt 18 Einzelbeiträgen die Möglichkeiten und Grenzen der Additiven Fertigung im Hinblick auf die Gestaltung von realen Bauteilen und Strukturen. Die Autoren sind Experten aus verschiedenen Fachgebieten von Hochschulen, Forschungseinrichtungen und Unternehmen.

Silizium Halbleitertechnologie

Author: Ulrich Hilleringmann
Publisher: Springer-Verlag
ISBN: 3834820857
Format: PDF, Mobi
Download Now
Ein Lehrbuch zu den grundlegenden Verfahren der Mikroelektronik und Integrationstechniken. Grundlage der mikroelektronischen Integrationstechnik ist die Silizium-Halbleitertechnologie. Sie setzt sich aus einer Vielzahl von sich wiederholenden Einzelprozessen zusammen, deren Durchführung und apparative Ausstattung extremen Anforderungen genügen müssen, um die geforderten Strukturgrößen bis zu wenigen 10 nm gleichmäßig und reproduzierbar zu erzeugen. Das Zusammenspiel der Oxidationen, Ätzschritte und Implantationen zur Herstellung von MOS- und Bipolarschaltungen werden - ausgehend vom Rohsilizium bis zur gekapselten integrierten Schaltung - aus Sicht des Anwenders erläutert. Das Buch behandelt neben den Grundlagen auch die technische Durchführung der Einzelprozesse zur Integrationstechnik. In der 6. Auflage ...